We offer a silane production package that produces ultra-pure silane gas that can be sold on the merchant market, used for the production of electronics-grade polysilicon or consumed in thin film applications. The high volume hydrochlorination and silane production/purification package is capable of producing approximately 12,500 MTA of silane from a single hydrochlorination fluid bed reactor (FBR) and a single silane production/purification line.

Silane Production Unit Bundled Deliverables:
  • Basic engineering package (BEP)
  • Key hydrochlorination equipment
  • Technical staff training
  • Start-up support
  • Operating guidelines

Features and Highlights

Key hydrochlorination and silane features that drive superior performance include:

>25% Hydrochlorination TCS conversion

>90% On-line time

VLSI grade Silane purity

Up to 12,500 MTA silane from a single FBR Annual Capacity

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